Hitachi High-Tech Launches Dark Field Wafer Defect Inspection System DI4600 to Provide High Throughput and High-Precision Defect Detection on Patterned Wafers

Tokyo, December 6, 2023 – Hitachi High-Tech Corporation ("Hitachi High-Tech") announced today the launch of the Hitachi Dark Field Wafer Defect Inspection System DI4600 – a new tool for inspecting particles and defects on patterned wafer in semiconductor production lines.