Hitachi Power Solutions launches Scanning Acoustic Tomograph that enables higher image quality of defect detection and one-time inspection for 300 mm wafers

Hitachi Power Solutions Co., Ltd. (Hitachi Power Solutions), today announced the launch of Scanning Acoustic Tomograph "FineSAT7" from October 1, as the newest model of FineSAT series of devices that detects and images minute structures and defects*1 such as delamination and voids inside semiconductors and electronic components nondestructively by utilizing the reflective and transmissive properties of ultrasonic wave. It enables high-quality defect-detection images and one-time inspection of 300 mm (12-inch) wafers by adopting an A/D conversion board*2 with the resolution by 16 times and the measuring period by twice compared to the conventional model. FineSAT7 will contribute to improve inspection accuracy and productivity in research, development, and manufacturing fields through these performances and functions.