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Clean Room Air Conditioning
2017/02/21
A clean room or cleanroom is a room that controls environmental conditions such as fine particles in the air, the necessary temperature and humidity, pressure, minute gas components, static electricity, minute vibrations, and electromagnetic waves. Clean rooms are indispensable for manufacturing precision industrial products such as semiconductors and display panels.
 
Industrial Clean Rooms (ICRs)
 
Clean rooms are required in manufacturing plants for such products as semiconductor integrated circuits used in electronic industry applications, liquid crystal display (LCD) panels, plasma panels, and micro-machines. Dust particles can be transferred to the semiconductor’s circuit pattern in the lithography process, causing the semiconductor to short circuit or rendering it defective. This work must therefore be done in a clean room. Dust particles can have similar deleterious effects on precision instruments and devices, which also require the use of clean rooms in their manufacturing plants.
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